24.4 C 51 Chemical Etching Technique for Investigations of a Structure of Annealed and Unannealed Proton Exchange Channel LiNbO3 Waveguides / I. S. Arozonova [и др.] // Ferroelectrics. - 2008. - Т. 374, № 1 PART 2. - С. 110-121 РУБ 24.4 Рубрики: Химия Аналитическая химия в целом Кл.слова (ненормированные): channel waveguide -- chemical etching technique -- cross section -- etching rate -- experimental data -- infrared regions -- integrated-optic components -- lithium niobate -- proton exchange -- single mode Аннотация: The proton exchanged channel waveguides are actively used for different integrated-optic components. There is a problem of the channel waveguide characterization because the single-mode channel waveguides for infrared region have the cross section about several microns. The wet etching and noncontact profilometry were used to investigate phase composition in proton exchanged channel waveguide. It has been found the known phases of HxLi 1-xNbO3 have noticeably different etching rates. So, obtained experimental data gives the possibility of phase composition identification for channels with cross-section down to ?2 ? m. Доп.точки доступа: Azanova, I. S.; Shevtsov, D. I.; Zhundrikov, A. V.; Kichigin, V. I.; Petukhov, I. V.; Volyntsev, A. B. |